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This paper proposes a novel evaluation method for MEMS gyroscopes' packaging reliability. Based on the principles of thermodynamics and hydromechanics, the relationships among quality factors, air pressure, and gas number, as well as degradation models of them, are deducted for the first time. Experimental tests demonstrate that the relationships between the reciprocals of the two-mode quality factors...
This paper analyzes the influence of the electrical coupling among interconnection lines in MEMS gyroscopes and proposes strategies during designing structure to eliminate its effect. Moreover, a compensation circuit is designed to further suppress coupling signal at the readout. The results of bias drift tests under full temperature range indicate that not only the bias drift in the vacuum is much...
This paper reports a novel method to accomplish automatic and real-time mode-matching control for a MEMS vibratory gyroscope based on fuzzy and neural network algorithms. Experimental results demonstrate that it only needs about 8 seconds to fulfil mode-matching automatically in the fuzzy control system, and a mismatching error lower than 0.32Hz is achieved over the temperature range from −40°C to...
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