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The improved oxidation resistance of TiAlN-based hard coatings is based on the formation of protective oxide scales. Here we report on further improvement of the oxidation resistance of TiAlN coatings by doping with Si and B. An industrial-scale cathodic arc evaporation facility was used to deposit Ti–Al–Si–N and Ti–Al–B–N coatings, with doping contents in the target of up to 2 at.% for Si and 0.5 at...
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