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This work aimed at studying the effect of a Ti interlayer and the alloying with carbon and nitrogen of W-S-C(N) films on the mechanical and tribological properties. The W-S-C and W-S-N films were deposited by r.f. magnetron reactive sputtering with CH 4 or N 2 as reactive gases and analysed by high resolution electron microscopy techniques. The hardness showed an improvement with the...
Two PVD titanium nitride based coatings; monolayer TiN and multilayer resulting from the stacking of TiN and (Ti,Al)N layers were evaluated with respect to their stress state and microstructure. The TiN was deposited by triode evaporation ion plating, whereas the TiN/(Ti,Al)N was deposited using a reactive hybrid deposition process consisting of a combination of electron beam evaporation of Ti and...
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