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To enable a large scale and high throughput fabrication of photonic crystal (PC) cavity lasers, we combined laser holography (for the background PC generation) and focused ion beam (for cavity formation). The resultant lasers exhibited threshold and output powers comparable to those of electron-beam generated ones.
We report fabrication and measurements on novel triangular ring resonators with extremely small multimode interference couplers and total internal reflection mirrors. Free spectral range and on-off ratio are 256 GHz and 14 dB respectively.
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