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Soft-nanoimprint lithography is a high-throughput and cost-effective lithographic technique with high resolution and low pressure, of which the crucial component is the mold. We demonstrate a method to fabricate hybrid soft-nanoimprint mold in benign ambient based on UV-curable thiol–ene polymer. Because of the special photopolymerization mechanism via “click chemistry”, thiol–ene can be cured completely...
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