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A ZnO-based film bulk acoustic resonator has been fabricated using a magnetron sputtering technology, which was employed as a biosensor for detection of mucin 1. The resonant frequency of the thin-film bulk acoustic resonator was located near at 1503.3 MHz. The average electromechanical coupling factor K eff 2 $$ {K}_{\mathrm{eff}}^2 $$ and quality factor Q were 2.39 % and 224, respectively...
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