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A novel orthogonal micro-fluxgate fabricated by a simple and inexpensive process is described in this paper. The sensor consists of an S-shape excitation wire surrounded by an electroplated Permalloy layer and a 3D micro-solenoid. The problem of low sensitivity, low input resistance and high noise of orthogonal micro-fluxgate were solved with the proposed structure. Standard Micro-Electro-Mechanic...
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