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Solid oxide electrolyte membranes of sputter deposited yttria-stablized zirconia (YSZ) were integrated in silicon technology for applications in micro power generators fuelled by hydrogen or H 2 +CO. An electrochemically deposited nickel grid was used as mechanical support for the 200-300 nm thick membrane. Cells with 0.5 to 5 mm diameter were fabricated showing mechanical stability up to...
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