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A novel RF-MEMS structure to achieve tunable bandwidth is presented in this paper. A movable nickel electrode is employed to realize tunable broad-side coupling. The bottom electrode is fabricated with high resistivity-SiCr to avoid performance degradation. This tunable coupling section is implemented in a planar MEMS tunable filter that consists of λ/2 coplanar waveguide (CPW) resonators...
In this paper, the viscoelastic behavior of a tunable RF-MEMS resonator and its impacts are studied by means of direct RF measurements for the first time. This tunable resonator consists of one λ/2 coplanar waveguide (CPW) resonator and two nanocrystalline-Ni RF-MEMS varactors. S-parameters of this tunable resonator have been measured for 80 hours under a bi-state bias condition of 0 and 40 V. It...
In this paper we present, for the first time, an experimentally-extracted model for the spring constant and tuning range of an analog RF-MEMS varactor that includes viscoelastic effects in RF-MEMS devices. By utilizing a bi-state bias condition with one state lasting 60 minutes and the other 1 minute, this model focuses on capturing the true electromechanical behavior of the varactor. An experimental...
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