The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Summary form only given. In order to extend the capability of the Hybrid Plasma Equipment Model (HPEM)1 simulation code to increasingly lower operating pressure conditions, the direct simulation Monte Carlo (DSMC)2 method is used to improve the modeling of the heavy particle species in a hollow cathode magnetron (HCM) plasma reactor, a device used to implement the Ionized Metal Physical Vapor Deposition...
In this paper, we discuss results from direct simulation Monte Carlo (DSMC) modeling of hollow cathode magnetron (HCMs) for deposition of Cu. DSMC provides the possibility of an exact solution of Boltzmann's gas dynamic equation, and so should be applicable to lower pressures than conventional computational techniques. To obtain plasma source functions, electric potentials and magnetic fields, the...
The standard detecting model of the laser radar is given, and the forms of the detecting model for different detecting conditions are analyzed at first. On the base of foregoing analyses, the detecting range models reflecting the main parameters relationship of the laser detector are set up. On the other hand, the detection probability and the false probability are the important indices of overall...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.