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Dual-wavelength light sources with stroboscopic illumination technique were applied in a process of photoelastic modulated ellipsometry to retrieve two-dimensional ellipsometric parameters of thin films on a silicon substrate. Two laser diodes were alternately switched on and modulated by a programmable pulse generator to generate four short pulses at specific temporal phase angles in a modulation...
Dual-wavelength light sources with stroboscopic illumination technique were applied in photoelastic modulated ellipsometry to retrieve two-dimensional ellipsometric parameters of thin films on a silicon substrate. Two laser diodes are alternatively switched on and modulated by a programmable pulse generator for triggering four short pulses at their specific temporal phase angle of a modulation cycle,...
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