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A simple, low-temperature hydrothermal method and atomic layer deposition (ALD) were used to fabricate ZnO nanostructures as subwavelength-structure antireflection layers (SWS ARLs) on Si solar cells. ZnO seed layers with wafer-scale uniformity were prepared, and ALD was used to reproduce two types of ZnO-based structures, nanorod arrays (NRAs) and nanotip arrays (NTAs). The study examined diammonium...
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