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This paper develops a novel and simple process device based on an atmospheric pressure air microplasma jet for the selective etching of parylene-C film. In order to realize the selective etching, a quartz glass microtube (100 µm, inner diameter) is employed to generate the air microplasma jet. Experimental results demonstrated Micro-holes, micro-trenches on parylene-C film were successfully fabricated...
Contact Guidance is an important phenomenon in the bio field. However it is complex and time-consuming to fabricate the micro/nano morphology used to guide cell growth behavior. Novel method of employing nanoimprint lithography to mass-produce nanostructures was investigated. The nanoimprint stamp consisting of uniform nanogrooves was fabricated by holographic lithography and inductively coupled plasma...
Double-cup assemblies of nanoscale gold semi-shells have been synthesized using a combination of thermal evaporation and chemical etching. The optical extinction of these structures peaked at 740 nm, but there was also evidence of additional extinction maxima at 560, 940 and 1110 nm. Numerical simulations of the optical properties revealed that the extinction was due mainly to scattering rather than...
A new method for realization of 3D multilayer micro structures is presented in this paper. It consists of two major processes: silicon etching process and UV-LIGA process. In this way, some shape limitations of single technology can be overcome for new functions. By combining these processes, multilayer structures and complex graphics can be fabricated. To make good combination, the adhesive characteristics...
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