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We fabricated (Ba 0.6 Sr 0.4 )TiO 3 (BST) thin films of various thicknesses on sapphire (−1120) substrates using metal-organic decomposition method. These films showed grain growth from 160 to 650nm with an increase in the thickness from 90 to 1050nm. At microwave frequencies, the measured capacitances of the planar capacitors decreased with the film thickness because the electro-magnetic...
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