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Mobility and velocity enhancements of hole on Si (110) and (100) substrates are accurately investigated for short-channel highly-strained pFETs. Local channel stress in short gate length is successfully observed for damascene gate pFETs with stressors by UV-Raman spectroscopy. A high channel stress of -2.4 GPa is measured for a 30-nm gate length device. Hole mobility and saturation velocity are precisely...
A raised source/drain extension (RSDE) pFET on (110) Si wafer is demonstrated for the first time with in-situ doped selective epitaxy technology. Roll-off has been effectively improved, resulting from the elimination of ion channeling in (110) Si. Due to the hole mobility enhancement and parasitic resistance reduction, ion of 389muA/mum (Vd= -1.0 V) has been achieved at Lmin around 30nm extracted...
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