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This paper presents a built-in self test pump actuated by piezoelectric bimorphs for fluidic systems. The sensor fabricated by MEMS ensures the flow to be 0.5μ l/s. There are two piezoelectric vibrators in the pump and the check valve is metal cantilever beam. The pump is characterized by integrated structure, flow with built-in self test, wide frequency response, etc. The size of the piezoelectric...
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