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An atomic force microscope (AFM) has been utilized to implement various manipulations with nanometer precision. Unfortunately, an AFM-based nanomanipulation system often meets the problem of low reliability and low efficiency, mainly due to the difficulty of positioning the AFM tip near the sample. In this study, a positioning control strategy is designed to accurately drive the probe to implement...
Piezoelectric actuators have been widely utilized in micro/nano systems due to the high positioning resolution. A typical instance is piezo-scanners equipped in scanning probe microscopes (SPM) to implement nanoscale measurement and manipulation for various samples. However, the inherent hysteresis and structural vibration of a piezo-scanner largely limit its positioning accuracy and bandwidth, as...
An atomic force microscope (AFM) usually employs proportional-integral (PI) control strategy to sustain a constant cantilever deflection. However, it is well known that the tuning of PI parameters is a tedious and complicated procedure, especially for those unfamiliar with control theory. In this paper, we employ and implement relay controller to automate the tuning procedure for contact-mode AFM...
As an important component of Atomic Force Microscope (AFM), piezo-scanner exhibits some undesired nonlinear characteristics, among which the inherent hysteresis largely decreases the scanning rate and resolution of AFM. To alleviate this problem, an image-based approach is proposed in this paper to model and then compensate for the hysteresis behavior of the piezo-scanner. Specifically, some scanning...
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