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TiO 2 are applied widely as photocatalytic materials. In this study, we investigated preparation of TiO 2 thin film with photoinduced hydrophilicity under weak UV light in indoor environment. TiO 2 films were prepared by rf magnetron sputtering process in an atmosphere of pure oxygen. Ar ion beam irradiation treatment of TiO 2 film was carried out using a plasma cathode...
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