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We present the design, fabrication and characterization of cubic (3C) silicon carbide microdisk resonators with high quality factor modes at visible and near infrared wavelengths which couple to the intrinsic luminescence in silicon carbide.
We demonstrate a novel materials technique for generating several hybrid solid state nano- and micro-photonic devices. Our approach combines the growth of nanoscale (∼100 nm) and micron scale (∼2 μm) diamonds on silicon carbide (3C and 4H polytype) substrate via chemical vapor deposition (CVD) from molecular diamond (‘diamondoid’) seed with the use of these particles as a hard mask for pattern transfer...
We present high quality factor (Q ∼ 103) photonic crystal cavities in cubic silicon carbide (3C-SiC) films grown directly on silicon. We show results in shifted-L3 and nanobeam cavity geometries for applications in nonlinear and quantum photonics.
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