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To explore the machining characteristics of glassy carbon by focused ion beam (FIB), particles induced by FIB milling on glassy carbon have been studied in the current work. Nano-sized particles in the range of tens of nanometers up to 400nm can often be found around the area subject to FIB milling. Two ion beam scanning modes – slow single scan and fast repetitive scan – have been tested. Fewer particles...
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