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A large rotation angle micromirror using hypocycloidal electrothermal actuators (HEAs) is presented. The mechanical rotation angle of the micromirror is ~35?? at 2.6 V in nonresonant mode. The Cr/Au coated square mirror plate is supported by two groups of HEAs in order to achieve single axis rotation. Four Al/Si bimorph structures are staggerly connected in parallel to form a HEA. This structure is...
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