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We study a Au (25 nm)/Cr (10 nm) bilayer system as a model of mirror for the soft X‐ray energy range. The Au and Cr thin films are a few nanometer thick and are deposited on a float glass substrate. The sample is characterized by using 3 complementary techniques: soft X‐ray reflectivity, glow discharge optical emission spectrometry (GDOES), and time‐of‐flight secondary ion mass spectroscopy (ToF‐SIMS)...
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