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In this letter, high-performance single-crystal-like nanowire poly-Si TFTs with simple spacer patterning technique were demonstrated and characterized. Due to the nanoscale dimension formed by spacer patterning technique, each nanowire is easily transformed within one crystalline grain of the standard sequential-lateral-solidification (SLS) poly-Si film with the regularly arranged grains and thus...
A flexible, highly-sensitive, and easily fabricated carbon nanotubes (CNTs) tactile sensor is reported in this paper. CNTs are grown and patterned on bulk-micromachined silicon substrate with 3-dimensional surface profile. After polymer molding, the CNTs with 3-dimensional distribution are successfully transferred onto a flexible PDMS with 3-dimensional tactile-bump. Advantages of presented tactile...
This study reports a novel packaging technique using the polymer cover. The polymer cover with built-in flexible connectors is mechanically interlocked to Si-substrate with built-in socket arrays. These components are realized using microfabrication processes and further integrated with MEMS-device chip. The shapes of socket/connector are easily patterned using processes. The typical interlocking...
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