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A MEMS-based humidity sensor is proposed comprising thiol-coated gold nanoparticles (AuNPs) deposited on a glass substrate with aluminum interdigitated electrodes (IDEs). In the proposed device, the humidity is measured by monitoring the change in the device resistance as the water molecules are absorbed by the AuNPs. A highly sensitive sensing performance is obtained as a result of the large surface...
In the study, a novel micro sensor is presented for detection of measurement of electrical current, consisting of a quartz substrate and Pt resistors. As current flow through the resistor, some energy is converted to heat. The power generated in this process is related to both the voltage across the resistor and the current flowing through it, which causes a resistance variation of the resistance...
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