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We report and analyze KrI*/I2* multi-emission spectra (160–360 nm) generated in a novel capacitively coupled 13.56 MHz rf lamp. The 13.56 MHz rf lamp, configured to avoid electrodes internal to the plasma, is used to generate a number of excimer emissions in the UV and visible spectral regions with potential biological, physical, and chemical application. We found that the total gas pressure strongly...
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