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Parallel surface contact between the template and the substrate is very important in imprint lithography. In this paper, a novel force-decoupled compound parallel alignment stage is proposed for high-resolution imprint lithography. It mainly consists of a high-stiffness spherical air bearing (SAB) and a multi-degree-of-freedom (multi-DOF) flexure-based mechanism that functions for both the active...
This paper presents the design and modeling methodologies of a novel flexure-based positioning stage with capable of traveling along two translational directions. A 4-PP parallel configuration is utilized to implement two planar translational motions. Each prismatic joint is achieved using a translational flexure hinge with a large deformation for smooth motion. The two layers are assembled in a top-down...
With the rapid development of nano science and precision engineering, a positioning system with high resolution is indispensable to meet the requirement of precise positioning. This paper presents the design and modeling of a flexure-based positioning stage with the functionality of resolution enhancement. To achieve high enhancement ratio, two sets of displacement reduction mechanisms are incorporated...
A bionic cockroach robot model is built with its coxa link made of flexible material. Locomotion performance affected by flexible material is analyzed via statics. Analysis of strain energy about flexible links is also presented through linear elastic deflections and pseudo-rigid-body models. The virtual cockroach robot model is built and the kinematic simulation is carried out by finite element and...
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