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Reactive sputtering is an option to further reduce costs associated with the deposition of the transparent front contact for chalcopyrite-based solar modules. Our approach here is to develop a proof of concept for a ZnO window, where the i-ZnO and the doped ZnO:Al are both sputtered in a reactive process. It is shown, that on cell level the device performance is preserved when replacing the standard...
Reactive sputtering is an option to further reduce costs associated with the deposition of the transparent front contact in chalcopyrite-based solar modules. In view of the difficulties reported in scaling-up reactive ZnO sputtering we have chosen a simple and robust approach. It is comprised of a dual magnetron operated in DC/DC mode, a constant oxygen flow and the process is controlled by target...
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