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We have fabricated Si nanocrystals utilizing nanometer-sized Pt islands acting as etching-masks on SiO x /amorphous-Si/SiO x /p-Si (100) thin films. In the measurement of transmission electron microscopy the Si nanocrystals embedded in SiO 2 were observed, and in the measurement of cathodoluminescence spectroscopy at 77 K Si nanocrystal-related peaks were observed at 462 and...
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