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This paper reports novel designed and fabricated micro airflow sensors based on the hot-wire sensing principle, i.e. gas cooling of electrically heated resistance. With three micro Ti/Pt hot-wire components with width of 50 µm and thickness of 130 nm fabricated on a glass tube (outer diameter of 2.8mm and inner diameter of 2.1mm) in five degrees of freedom (5DOF) UV lithography system with multi-layer...
High-resolution airflow monitoring in urban environments requires deployment of a large number of anemometers with precise measurement capability of both wind speed and direction in two or three dimensions. Existing sensors are too expensive and/or bulky for this application. It is known that microelectromechanical systems (MEMS) sensor-based anemometers can be low in cost for mass production. And...
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