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Micro-indentation test with a micro flat-end cone indenter was employed to simulate micro embossing process and investigate the thermo-mechanical response of ceramic green substrates. The laminated low temperature co-fired ceramic green tapes were used as the testing material; the correlations of indentation depth versus applied force and applied stress at the temperatures of 2SdegC and 75degC were...
In large area micro hot embossing, the process temperature plays a critical role to both the local fidelity of micro structure formation and global uniformity. The significance of low temperature hot embossing is to improve global flatness of embossed devices. This paper reports on experimental studies of polymer deformation and flow modes in micro embossing when the process temperatures are below...
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