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We report various SF 6 /Ar plasma textured periodic glass surface morphologies with high transmittance, haze ratio, and root mean square (rms) roughness of ITO:Zr films for amorphous silicon thin film solar cells (a-Si TFSCs). SF 6 /Ar plasma textured glass surface morphologies contain micro- and nano-textured features that help to scatter the light in visible and near infra-red (NIR)...
Inductive coupled plasma-reactive ion etching (ICP-RIE) offers an anisotropic texturing with superior surface structure of glass substrate. We report light trapping scheme of ICP-RIE glass texturing by SF 6 /Ar plasma. We observed that surface structure is an important factor to improve the diffused transmittance and haze ratio of textured glass. The presence of metal elements like Al, B,...
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