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Logic LSI chips fabricated by 180nm process were measured by a prototype system of the laser terahertz emission microscope (LTEM). By comparing the LTEM images between a normal circuit and a defective one, p-n junction connected to the defective interconnect such as open or short circuits can be successfully determined under non-bias measurement condition. This result indicates that LTEM can be a...
We have developed a prototype system of a laser THz emission microscope (LTEM) for inspecting electrical failures in large-scale integrated circuits (LSIs). LTEM measures the THz emission images on LSIs by exciting the p-n junctions with ultra fast laser pulses. Without any electrical probing, we successfully identified interconnection built-in defects such as open or short circuit in C7552 ISCAS'85...
To evaluate the performance for non-contact testing of large scale integrated circuits, we observed various simple test circuits after build-in defect using laser THz emission microscope (LTEM), which detects THz wave amplitude emitted from semiconductor test circuits excited by focused ultrafast laser pulses.
In this work presents a picosecond pulsed Ti:sapphire laser pumped with a frequency-doubled LD-pumped cw Nd:YVO4 laser and intracavity second harmonic generation (SHG) of picosecond pulsed rapid and random wavelength tuned Tksapphire laser. The laser allows the tuning range from UV to blue with picosecond duration. Moreover, the paper demonstrated a pumping of fluorescent proteins (FPs) using the...
We have developed a laser-terahertz emission microscope for inspecting the electrical faults in integrated circuits. By improving the spatial resolution of the system, we successfully observed the THz emission image in a microprocessor chip on standby.
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