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A novel Ka-band surface micromachined air-elevated patch antenna is designed, fabricated, and characterized. It demonstrates a 10.5%?10-dB fractional bandwidth and 9.5-dBi directivity for an elevation of 600 $mu m$. The elevated patch is fed by a vertical epoxy-core metal-coated micromachined probe and supported by several epoxy posts underneath. By the unique feeding technique and the substrate removal...
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