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A thermally driven micro-electrostatic fieldmeter is reported, which mainly consists of sense electrodes, grounded shuttle electrodes, bent beam thermal driver, etc. The bent beam thermal driver is driven with a square wave of amplitude as low as ±2V amplitude and of frequency as high as 20kHz. The electric field intensity resolution of the electrostatic fieldmeter can reach 240.8V/m.
A thermally driven miniature electric field sensor (MEFS) has been designed, fabricated and tested. It is mainly comprised of shielding electrodes, bent beam thermal driver, positive and negative sense electrodes and drive pads etc, the shielding electrodes are driven by a cascaded bent beam thermal driver to periodically cover or expose the positive and negative sense electrodes. The thermally driven...
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