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This paper presents a novel design of a three degrees of freedom (DOFs) MEMS-based precision manipulator. The purpose of the manipulator is to position a microscope tool on the work plate doing small movement tasks. A parallel kinematic mechanism with three legs is used to convert the motion of longitudinal comb-drives into three direction translations at the end-effector. Each leg has three joints...
This paper presents a comparison study of two unique micro-motion parallel kinematic manipulators (PKM): a three degrees of freedom (DOF) micro-motion PKM and a 3-DOF micro-motion PKM with actuation redundancy. The 3-DOF micro-motion PKM has three linear-motion driving units, while the 3-DOF micro-motion PKM with actuator redundancy has four of these units. For both designs, the linear motion driving...
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