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The creation of superhydrophobic surfaces that mimick lotus leaves is a relatively new research field that has attracted considerable attention. It shows promising applications in self-cleaning, microfluidics, bio-antifouling, and anticorrosion etc. Generally two requirements must be satisfied in order to achieve superhydrophobicity. First, the surface must be hydrophobic with a contact angle greater...
Carbon nanotubes (CNTs) have been proposed as electrical interconnects in microelectronic devices to address such problems as stress, electromigration, and heat removal. For electronic device and packaging applications, chemical vapor deposition (CVD) methods are particularly attractive due to characteristic CNT growth features such as selective spatial growth, large area deposition capability and...
After treatment in different Fenton's reagents, chemical changes in Nafion ® membranes were analyzed by X-ray photoelectron spectroscopy (XPS) and clear evidence of polymer degradation was observed. Exposure of the membrane to 2h of X-ray radiation did not affect the chemical structure of the membrane. However, treatment with various Fenton's reagents indicated that the (CF 2 ) ...
A CNT stack formation technique is used for the pseudo in-situ monitoring of CNT growth in the kinetics-controlled regime. CNT stacks are fabricated by water-assisted selective etching and the cyclic introduction of ethylene into the chemical vapor deposition (CVD) reactor. By varying the growth temperature and the ethylene flow rate within growth cycles, the reaction was shown to be first order with...
Plasma polymerization was used to produce thermoresponsive hydrogel films of N-isopropylacrylamide (NIPAAm) in a single deposition step. Solvent free processing to produce laterally confined intelligent hydrogel films offers the potential for high volume production of micro-sensors/actuators. Through variation of reactor conditions such as deposition pressure and substrate temperature, it is possible...
The remarkable properties of carbon nanotubes (CNTs) make them attractive for microelectronic applications, especially for interconnects and nanoscale devices. In this paper, we describe a microelectronics compatible process for growing high-aspect-ratio CNT arrays with application to vertical electrical interconnects. A lift-off process was used to pattern catalyst (Al 2 O 3 /Fe)...
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