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A detailed time-of-flight secondary ion mass spectrometry (ToF-SIMS) analysis of the lithium de-/intercalation in thin films of the insertion cathode material lithium cobalt oxide is presented. The LiCoO2 (LCO) thin films are deposited by radio frequency magnetron sputtering at 600 °C, having a (003) preferred orientation after the deposition. The thin electrode films are cycled with liquid electrolyte...
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