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Gas permeation membranes were prepared by exposing multilayered ceramic substrates to low temperature plasmas of C 4 F 8 , CHF 3 and CF 3 -CH 2 F in the presence of argon as carrier gas. Permeation rates for CO 2 , N 2 and He were measured and ideal selectivities were calculated from the permeability ratios. The chemical structure of plasma...
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