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High-density piezoelectric micromachined ultrasonic transducer (pMUT) arrays have been designed and fabricated using silicon based micromachined process. These devices are based on a novel structure called “reverse-bonding”. Experimental results show that they have excellent performance, suitable resonance frequency and high reliability. The fabricated pMUT arrays are very promising for 3-D medical...
Piezoelectric micromachined ultrasonic transducer (pMUT) is a new approach for the construction of 2-D arrays for real-time 3-D medical imaging. In this work, 6times6 pMUT arrays with element pitch down to 150 mum were successfully fabricated and characterized. The devices consist of 2 mum PZT film on a 3 mum Si/SiO2 supporting layer, and the multilayered membrane was released by a two-step process...
This paper presents the design, fabrication, and characterization of a piezoelectric micromachined ultrasonic transducer (pMUT) operating in d33 mode. A piezoelectric PZT thin film is polarized along the in-plane direction using top square interdigital electrodes (IDEs), and the in-plane polarization and IDEs enable the pMUT to operate in d33 mode, which allows the PZT to convert the ultrasonic pressure-induced...
In this paper, a novel piezoelectric film based ultrasonic microspeaker array is proposed. The SiO2/Pt/Pb(Zr,Ti)O3 /Pt/Ti/SiO2 multimorph structure has been designed and fabricated using silicon based micro-machining process. The membrane size of the single transducer cell is 1000times1000times2.5 mum 3, and the main resonance frequency is located near 68kHz. The performance of directivity is a very...
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