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An enhanced flow sensor is under development at IMTEK to enable simultaneous measurement of thermal properties of a fluid and its flow velocity. AC heating is used to obtain more and detailed information on the fluid properties. Here, we present the flow characteristics of our sensor for liquids and show the influence of thermal conductivity of the fluid on the temperature amplitude at the central...
This paper introduces a micro-sensor compatible with Bio-MEMS applications for wide-range thermal flow rate measurements in liquids. Based on the applied materials and geometry, the sensor allows an outstanding resolution at minimum thermal cross-talk, enabling flow rate measurements down to 100μg/h in water, i.e. 100nl/h. Active and passive measuring principles, their respective applications, and...
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