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With the development of power data network, the requirement for the free exchange of intelligent information has been put forward. The traditional power monitoring system needs to install a separate application software in the control panel, of which the long program development cycle, the complex deployment and maintenance, the poor compatibility and other shortcomings bring great inconvenience to...
A fully automated advanced process control (APC) is developed for rapid thermal process (RTP) thin gate oxide (Gox) to improve both within wafer (W-in-W) and wafer to wafer (W-to-W) thickness uniformity. In addition, novel feed-forward implant dosage compensation is integrated to further improve the W-to-W drain saturation current (Idsat or Ion) uniformity based on Gox thickness and poly critical...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.