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High growth-rate deposition of ~2μm/h has been achieved for high-quality diamond (100) film growth by means of high-power microwave-plasma chemical-vapor deposition (MPCVD). The growth rate is at least 40 times higher than the values reported from conventional low-power MPCVD in the case of high-quality diamond film growth. Cathodoluminescence spectra from the grown diamond films reveal strong band-edge...
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