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Gold nano-structures (clusters and layers) were sputtered on the glass substrate. Lattice parameter was determined by X-ray diffraction. Density of Au nano-structures was calculated depending on structures size. Density of gold structures increases from the value of 13.6·10 3 to 19.3·10 3 kg m −3 . Free volume fraction of structures decreases from the value of 48 to 26%.
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