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The contact behavior with high-friction and low normal adhesion between a wafer and an end-effector of a wafer transfer robot is crucial to the high efficiency of wafer transfer. In this paper, a novel method of wafer transfer based on micro-fiber array is presented as well as the detailed design of micro-fiber array with high-friction and low-adhesion for wafer transfer. An interaction model is firstly...
A novel velocity sensor based on electromagnetic induction was proposed in this paper. It was composed of four small inductor chips with circular symmetrical distribution on the bottom of a printed circuit board (PCB) and an elastic body with a permanent magnet embedded into on the top of the PCB. The output voltage of each inductor chip will change when an object moves on the top of sensor and drives...
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