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Defect- and strain-enhanced cavity formation and Au precipitation at the interfaces of a nano-crystalline ZrO 2 /SiO 2 /Si multilayer structure resulting from 2MeV Au + irradiation at temperatures of 160 and 400K have been studied. Under irradiation, loss of oxygen is observed, and the nano-crystalline grains in the ZrO 2 layer increase in size. In addition, small cavities...
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