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Ultrathin bismuth titanate films (Bi 2 Ti 2 O 7 , 5–25nm) are deposited onto SiO 2 /Si substrates by aqueous chemical solution deposition and their evolution during annealing is studied. The films crystallize into a preferentially oriented, pure pyrochlore phase between 500 and 700°C, depending on the film thickness and the total thermal budget. Crystallization causes...
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