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NiO thin films with thicknesses in the range of 100 to 900 nm were deposited by spray pyrolysis onto photostructurable glass substrates and, ultimately, free-standing membranes with diameters of 100, 200 and 300 µm were fabricated using these thin films. The membranes are intended to act as simplified anodes or anode current collectors in micro solid oxide fuel cells (µSOFCs) and their differential...
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