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In this study, silicon nitride (SiN x ) protective films were deposited on flexible Ni film flow sensors using ion beam assisted deposition (IBAD). Microstructures of the Ni films with and without SiN x protective layer were analyzed by X-ray photoelectron spectroscopy (XPS) and X-ray diffractometer (XRD). The effect of SiN x protective layer on the performance stability of...
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