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The NbN and Nb films are prepared by the technique of radio frequency (RF) magnetron sputtering and heat-treated at 300°C and 400°C respectively in the present work. The influences of heat-treatment on the morphology, chemical composition, structure, nanomechanical properties and corrosion resistance of the films are studied. Results show that the particles in the films prepared by the above method...
Tantalum nitride as a promising material for applications has attracted considerable interest due to such promising properties as superhardness and high temperature stability. In this paper, the TaN films were deposited on the single crystal superalloy by radio frequency (RF) reactive magnetron sputtering in an argon-nitrogen atmosphere. The effect of gas pressure on the mechanical property, morphology,...
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