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Cu 2 ZnSnS 4 (CZTS) films were fabricated from a ceramic quaternary target, through middle frequency magnetron sputtering. A post sulfurization process was applied for the sputtered films and sulfurization temperatures ranging from 460 °C to 580 °C were utilized. It has been found that obvious Zn loss exists during the sputtering, making the sputtered films become Zn poor although...
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